A Perspective on the Reliability of MEMS-Based Components for Telecommunications

Despite the initial skepticism of OEM companies regarding reliability, MEMS-based devices are increasingly common in optical networking. This presentation will discuss the use and reliability of MEMS in a variety of network applications, from tunable lasers and filters to variable optical attenuators and dynamic channel equalizers. The failure mechanisms of these devices will be addressed in terms of reliability physics, packaging methodologies, and process controls. Typical OEM requirements will also be presented, including testing beyond of the scope of Telcordia qualification standards. The key conclusion is that, with sufficiently robust design and manufacturing controls, MEMSbased devices can meet or exceed the demanding reliability requirements for telecommunications components.